| Part No. | Description | Maker | Warranty | Lead time |
| SERV.502.28413 SERV.639.68481 |
WH Double Folder Robot | ASML | 6~8 weeks | |
| SERV.651.69301 SERV.639.68471 |
SCARA MK5 Robot | ASML | 6~8 weeks | |
| 0010-76051 0010-13320 0010-13321 0010-09195 |
P-5000 Robot | AMAT | 6~8 weeks | |
| PG-CR-B0D1 | ES3 Scanner Wafer Transfer Robot | CANON | 6~8 weeks | |
| TAZMO Vacuum robot | TAZMO | 6~8 weeks | ||
| SR8602-0002AAR | SANKYO Wafer transfer robot | SANKYO | SC3150 robot controller repairable |
6~8 weeks |
| 5085-407036-19 | TEL Track Lithius Robot | TEL Tokyo Electron | 6~8 weeks |
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